Tungsten trioxide target is often used as the evaporation material of WO3 thin film. Producing process of tungsten trioxide target adopting electric ceramic, process is ball milling, compression moulding and calcination.
During the producing process, quality of raw material has determined effect on property of ceramic. Differences between functional ceramic and traditional ceramic are embodied in the control of raw material, grain size and distribution, reacting activity, crystalline and cost. The common tungsten trioxide target producing methods are solid phase method, vapor phase method and liquid phase method.
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